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This search has been performed for all patent publications within the last 6 months in class C23C ().

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Title:ORGANIC COMPOUND STEAM GENERATOR AND APPARATUS FOR PRODUCING ORGANIC THIN FILM
Applicants:ULVAC, INC.
Inventors:NEGISHI, Toshio; HIRAIWA, Hideyuki
Main IPC Subclass:C23C 14/24; C23C 16/44; H01L 51/50; H05B 33/10
Agent:Korber, Martin Hans
Application:2010-02-23 as 10746189.9
Publication:2012-01-04 as EP2402480A1
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